Research on the Factory Automation Software Based on the SEMI Standard

摘要

Factory automation (FA) system software is a bridge to realize information exchange between processing equipment of semiconductor equipment and factory host. It receives the control instruction sent by a host, and sends the control instruction to the manufacturing equipment after internal analysis and processing. At the same time, FA receives the real time data and the various process parameters sent by equipment, processes the data, and sends the data to the host. In this paper, analysis of the process of semiconductor processing equipment, according to the actual needs of the semiconductor processing equipment, research on FA Software based on the SEMI standard.