DEVELOPMENT OF FIRST PRODUCTION FLAW DETECTING SYSTEM FOR ON-DEMAND REPAIR OF LARGE-SCALE CIRCUIT

摘要

In order to realize efficient high-mix low-volume production, improvement of yield rate by reducing production flaw is important technique. Manufacturing of touch panel display with large scale wiring board is a typical example of the high-mix low-volume production. AIST has proposed Laser assisted Ink-Jet printing (LIJ) technology, which can repair the flaw of circuit with silver nanoparticle ink. To establish in-process repairing system for touch panel display, a first production flaw detecting system is demanded with combining to the LIJ technology. Therefore, the aim of this study is to develop a new first production flaw detecting system, which detects flaw of large-scale circuit quickly. In this report, we mention to a basic concept of proposed system, and performed some preliminary experiments using developed measurement systems. Demanded performance for first production flaw detecting system was discussed. And the concept of basic style of detecting system and optical set-up was selected. A preliminary first production flaw detecting system with galvano-scanner and multi photodiode array was developed to confirm a detection of flaws and pattern profile. Some basically experiments have been conducted to check the performance of this system. An imitated flaw was scratched on the circuit patterns and the experimental results show the sclatched flaw has been detected by this equipment. The height detecting technique for this system was mentioned and preliminary experiment using developed system. By using laser trigonometry method, displacement of height information was detected sufficiently.