We have developed a high resolution beam position monitors for ATF2 at KEK, which is an accelerator test facility for International Linear Collider (ILC). The main goals of ATF2 are achievement of 37nm beam size and 2nm beam position resolution for beam stabilization. For these goals, Low-Q IP-BPM (Interaction Point Beam Position Monitor) with latency of 20 ns is being developed. In this paper, we will describe about design of Low-Q IP-BPM, the basic test results as RF test and BPM sensitivity test. Electronics for Low-Q IP-BPM will be also described.
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