Vacuum System Design of Ion Nitriding and PCVD Composite Treatment Furnace

摘要

Vacuum system design is an important part of the heat treatment furnace. In this paper, the vacuum system of ion nitriding and PCVD composite treatment furnace is advanced a complete and thorough design and calculation to select a vacuum system that is composed of mechanical booster pump and a mechanical vacuum pump, which is also called roots vaccum pumps-mechanical vacuum pumps.