Influence of Annealing Temperature on the Properties of Nanostructured ZnO Thin Film Prepared by Sol-Gel Method

摘要

Nanostructured ZnO thin film has been prepared by using sol-gel method. The influence of annealing temperature on the structural, surface morphology and the properties has been investigated. The morphology of the nanostructured ZnO was observed by scanning electron microscopy (SEM) and their properties were measured by using the I-V measurement. The annealing temperature of 500°C, 600°C and 700°C has been observed and the I-V measurements were measured at different relative humidity to studies on the sensitivity of the nanostructured ZnO. The SEM demonstrates that the glass substrate was deformed at 700°C of annealing temperature and I-V measurement studies shows that the resistance of nanostructured ZnO thin film is decreased with annealing temperature and relative humidity. Sensitivity also decreases with the increases of annealing temperature.