Design and Flow Simulation on A Variable Structure Plasma Reaction Chamber

摘要

A new variable structure chamber was designed to plasma reaction with two-stage showerhead, and its flow filed dynamic control equation was analyzed and meshed by ICEM. The simulation research for the meshed models was analyzed by a commercial software-Fluent, by changing various parameters such as mass flow inlet, height, diameter and section of outlet. The result shows that the height and diameter variation for chamber has a little influence on the pressure upon susceptor. However, when the mass flow increases in inlet, the pressure improves, and it also changes as the section variation of outlet.