Study on the manufacturing process of polymer microfluidic chip with integrated Cu micro array electrode

摘要

To produce perfect polymer microfluidic chip with integrated metal micro array electrode, an oxygen-plasma assisted manufacturing process was developed. The Cu micro array electrodes on the poly substrate was formed by photolithography, sputtering and wet etching; the micro channels on the polymer plate were hot-embossed using metal master; the bonding of cover plate and substrate using thermal bonding. The surface of the polymer plate with micro channels was treated by oxygen-plasma before thermal bonding. The oxygen-plasma treatment could decrease thermal bonding temperature from 100°C to 85°C. The bonding of this chip is complete, the micro electrode array keeps its integrity, and the micro channel is not distorted obviously.