Optical property of random inverted-pyramid textures on Si surface by etching with N-fluoropyridinium salts

摘要

We have proposed a new photo-etching method to form Si surface textures with N-fluoropyridinium salts. Si is etched by applying N-fluoropyridinium salts to its surface and exposing the surface to light. Etching depth increases with light intensity. We have formed random inverted-pyramid textures on a Si surface by controlling the light intensity at a constant temperature.