Local Synthesis of CuO Nanowires on CMOS Microhotplates for Gas Sensing Applications

摘要

In this contribution, we report on CuO nanowire devices integrated on CMOS microhotplates working as miniaturized, low power consumption gas sensors. The CuO nanowires were synthesized by thermal oxidation of a microstructured Cu thin film by local heating of the CMOS microhotplates. Direct nanowire device integration could be achieved as CuO nanowires form an electrical connection between adjacent oxidized Cu microstructures. By this approach, functional gas sensors were realized which require a low power consumption of less than 20 mW in order to attain the operation temperature around 325°C. The gas sensing properties of the CuO nanowire devices were investigated during exposure to humidity pulses. Moreover, the devices were found to be suitable for detecting the toxic gas CO at concentrations down to 10ppm and thus are potential candidates for future integrated smart gas sensor devices for security applications.