Photothermal Response in Semiconducting Microcantilevers Produced by Laser Excitation

摘要

The elastic vibration of semiconducting microcantilever, which was excited with a frequency-modulated pump laser, was optically detected use another probe beam. The photothermal signals were measurement near the resonant frequency. The changes of vibration amplitude and phase with the change of modulation frequency were obtained for a set of different sized microcantilevers. The results showed that the experimental results had a good agreement with the theoretical ones.