The solution flow type micro-droplet cell (Sf-MDC) was applied to local anodizing for formation of thickness and width controlled porous type aluminum oxide films. The effect of substrate temperature and repetition number of droplet on the film formation behavior was investigated. Formed oxide film thickness increased with both increasing substrate temperature and repetition number. The current during anodizing decreases with inverse of substrate temperature. Controlling the substrate temperature and the repetition number make it possible to form area and thickness controlled porous type aluminum anodic oxide films.
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