Confocal fusion: towards the universal optical 3D metrology technology

摘要

In recent times, optical measurement technologies for the three dimensional characterization of technical surfaces have been extensively used. Some of the most common are Coherence Scanning Interferometry (CSI), Imaging Confocal Microscopy (IC), and Focus Variation (FV). Each one has its benefits and its drawbacks. In this work we present the results of using a Microdisplay Scanning type of Confocal Microscope to acquire, on a simultaneous scan, confocal and focus variation information to reconstruct a three dimensional measurement, which performs exceptionally on several industrial samples where the aforementioned technologies are limited separately.