EFFECT OF PRIMARY GRAIN SIZE OF SrZrO_3/ZrO_2 NANO-DISPERSED COMPOSITE ABRASIVE ON GLASS POLISHING PROPERTIES

摘要

We studied glass polishing properties with SrZrO_3/ZrO_2 nano-dispersed composite abrasive with different primary grain size. The nano-composite particle was synthesized by spray pyrolysis technique and calcined at temperatures of 800-1200°C in order to control primary grain size. The high chemical mechanical polishing (CMP) performance generated using the abrasive with primary grain size of less than 80 nm. On the other hand, the CMP effect decreased in the case of the grain size of more than 100 nm. The distance between operating points of chemical and mechanical interaction was of consequence for CMP performance in the nano-composite abrasive.