Size effect on pull-in behaviors of electrostatically actuated cantilever micro-beams

摘要

For the deformation problem of an electrostatically actuated cantilever micro-beam, size effect on pull-in behaviors of the micro-beams have been studied based on modified couple stress theory. The approximate analytical solutions to the pull-in voltage and pull-in displacement of the micro-beam are derived by using the Rayleigh-Ritz method. The results show that the normalized pull-in voltage of the cantilever micro-beam is size-dependent and the normalized pull-in displacement of the micro-beam is size independence.