Research Progress of Capacitive Flexible Pressure Sensors

摘要

The flexible pressure sensors which cover the human body can generate electric signal under pressure. Compared to other types of pressure sensors, the capacitive flexible pressure sensors have the advantages of low energy consumption, fast response time and low detection limit. In order to obtain high performance capacitive flexible pressure sensors, efforts have been done on the structures and materials of sensors. This chapter reviews the methods to improve the sensor performance, including the preparation of microstructures and composite dielectric layers. Moreover, the research progress of capacitive flexible pressure sensors in the fields of intelligent medical and robotics is summarized. Finally, the prospects and challenges are discussed for capacitive flexible pressure sensors.