Preparation and Study of the Hot Filament CVD Diamond Coated Tools

摘要

The surface of the carbide YG6 milling insert was roughened by using three different pretreatment crafts, the diamond films was deposited on the substrate surface, after deposition, the morphology and quality of the diamond films were detected by using the scanning electron microscopy and the laser Raman spectroscopy, the adhesion strength of the membrane-based was discovered by using the method of indentation test. The results showed that: the surface of the substrate had the lower surface roughening with the hydrochloric acid aqueous solution and methanol solution pretreated, in addition the surface of the films had cracks, obviously, the adhesion strength of the membrane-based was unsatisfactory; However, the surface of the substrate had the higher roughening degree with the sulfuric acid hydrogen peroxide solution pretreated, and with good adhesion strength between the film and substrate.