The optimization and experiment of the low-pressure water jet assisted laser etching on Al_2O_3 ceramic

摘要

The ordinary laser etching on Al_2O_3 ceramic could bring many problems. Here introduced a new process named low-pressure water jet assisted laser etching on Al_2O_3 ceramic. The new composite process is much better than ordinary laser etching on Al_2O_3 ceramic. And the water jet can greatly reduce the thermal cracks and slag which improved the quality of the Al_2O_3 ceramic surface apparently. It also shows that the parameters of the laser have complex influences on the etching surface quality. Here introduces the method of orthogonal experiment to finish the experiment. Via this method can not only reduce the times of the experiment but also clearly reflect the optimization of the experimental parameters.