Laser Trigonometry Measurement System of Micro Cantilever Vibration

摘要

This paper presents a laser trigonometry system measuring a micro cantilever's vibration. The system includes a semiconductor diode laser, a short-focus optical system, PSD (Position Sensitive Detectors) and its signal enlarging system, and data collection system. The system can be used to measure the vibration data of micro frictional pairs. Compared with image method, the measuring frequency is higher and more accurate.