High Coupling and zero TCF SH-SAW and SH-Boundary SAW Using Electrodes/Rotated Y-X LiTaO_3 and SiO_2/Electrodes/Rotated Y-X LiTaO_3

摘要

In this paper, electrode Au/Rotated Y-X LiTaO_3 and SiO_2/electrode Au/ Y-X LiTaO_3 of SH-SAW without propagation attenuations are analyzed using the mass loading effects of electrodes and dielectric layers. Au/Rotated Y-X LiTaO_3 results show zero propagation attenuation and high coupling substrates of new cut angles with the TCF of - 20ppm/C at short surface. SiO_2/ Au/ Y-X LiTaO_3 results of SH-SAW surface wave show the zero propagation attenuation and high coupling substrates of new cut angles with the TCF of 0 ppm/C at SiO_2 thickness of H/λ =0.15 at the short surface. Also, we show new cuts of the higher k~2 and zero propagation attenuation substrate of Boundary SH-SAW with zero TCF. Also we show the experimental results of wide band and high Q resonators.