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Improving Machining Localization and Surface Roughness in Wire Electrochemical Micromachining Using a Rotating Ultrasonic Helix Electrode

机译:使用旋转超声螺旋电极改善电化学微机械加工定位和表面粗糙度

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摘要

Wire electrochemical micromachining (WECMM) technology is regarded a promising method to fabricate high aspect ratio microstructures on hard-to-machining materials, however, the by-product accumulation in the machining gap limits its application. In this paper, a new method called ultrasonic-assisted wire electrochemical micromachining (UA-WECMM) is proposed to improve the machining performance of WECMM. Firstly, a flow-field simulation in the machining gap was carried out; the results showed that the ultrasonic vibration of electrode can remarkably enhance the mass transport in the machining gap and improve the machining condition. Secondly, experiments were performed to confirm the effect of ultrasonic vibration, which illustrated that the vibration with proper amplitude can reduce the slit width and improve the morphology of machined surface. Moreover, the influence of other machining parameters were also discussed. Finally, a T-type micro connector with good surface roughness ( a 0.286 μm) was fabricated on a 300-μm-thick 304 stainless steel workpiece and a micro gear (diameter: 3.362 mm; a: 0.271 μm) with an aspect ratio of 7 was fabricated on a 2-mm-thick workpiece. It is proved that the proposed ultrasonic-assisted wire electrochemical micromachining method has considerable potential and broad application prospects.
机译:线电化学微机械线(WECMM)技术认为是制造高纵横比微结构对硬加工材料的高纵横比微结构,然而,加工间隙中的副产物积累限制其应用。本文提出了一种称为超声波辅助线电化学微机械线(UA-WECMM)的新方法,以改善WECMM的加工性能。首先,进行加工间隙中的流场模拟;结果表明,电极的超声波振动可以显着增强加工间隙中的质量传输,提高加工条件。其次,进行实验以确认超声波振动的影响,这示出了具有适当振幅的振动可以降低狭缝宽度并提高加工表面的形态。此外,还讨论了其他加工参数的影响。最后,在300μm厚的304不锈钢工件和微齿轮(直径:3.362mm;答:0.271μm)上制造具有良好表面粗糙度(0.286μm)的T型微连接器,具有纵横比7在2毫米厚的工件上制造。事实证明,提出的超声波辅助电化学微机械测量方法具有相当大的潜在和广泛的应用前景。

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