The Piezoelectric Constant Testing System Based on the Principle of Laser Scanning Fabry-Perot Interferometer

摘要

The principles of measuring tiny deformation by scanning Fabry-Perot interferometer have been studied. The measuring method of piezoelectric constant testing based on laser scanning Fabry-Perot principle was proposed. This measuring method was verified through contrasting the measured values with the known ones of piezoelectric constant and the result showed the errors between them were less than 6%.