Preparation of ITO Target by Molecular Dynamics Simulation with Normal Pressure Sintering Method

摘要

The volume change of ITO target sintering at different temperature of 1673 K, 1773 K, 1793 K, 1823 K, 1853 K and 1873 K were investigated by means of molecular dynamics simulation. The experimental results revealed that the rate of reduction in bulk was very fast in prior period of ITO green sintering process, and it was slow in later period. The atomic model of ITO green got the smallest value of 890.918 nm~3 at the 1853 K, and the ITO green can receive the highest densification at this temperature. The simulation results can provide theoretical direction for ITO target normal pressure sintering method.