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Parameter optimization of laser-doped selective emitters for applications in silicon solar cells

机译:硅太阳能电池应用激光掺杂选择性发射器的参数优化

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The use of selective emitters in p-n junction solar cells is a well-known way to increase cell efficiency by 0.4 - 0.5% (absolute) with the addition of a few processing steps. In a selective emitter, the region directly below the metal-contact fingers is more heavily doped than the shallow p-n junction. This allows for enhanced carrier collection by shielding minority carriers from the contacts, thereby lowering recombination at the metal-semiconductor interface. In contrast to earlier expensive techniques involving fine-line lithography, laser processing provides an ideal way to create these selective emitters because of its ability to locally heat and dope the surface of the cell without any external patterning steps. In this study, Q-switched lasers of wavelengths 1064, 532, and 355 nm are used at a range of pulse energies to create selective emitters on a p-type FZ silicon wafer with a thin n+ dopant film deposited on the top surface of the wafer. In addition to the Q-switched lasers, a 1070 nm continuous wave laser is also used and both the pulse energy and pulse duration are varied. To determine the effect of the n+ dopant film, the thickness of the film is also varied and processed with all of the lasers. The results from these lasers and the different dopant layers are characterized electrically through current-voltage measurements and compared to determine the optimal processing wavelength and energy for the selective emitters which maximize diode performance while minimizing crystal lattice damage and series resistance.
机译:在P-N结太阳能电池中使用选择性发射器是通过添加少数处理步骤的众所周知的方法,以增加电池效率0.4-0.5%(绝对)。在一种选择性发射器中,在金属接触指状物以下的区域比浅P-N结更加掺杂。这允许通过屏蔽少数载流子从触点屏蔽少数载流子,从而降低金属半导体界面的重组。与涉及细线光刻的早期昂贵的技术相比,激光加工提供了一种创造这些选择性发射器的理想方法,因为它能够在没有任何外部图案化步骤的情况下局部加热和掺杂电池表面的能力。在该研究中,在一系列脉冲能量的范围内使用波长1064,532和355nm的Q切换激光器,以在P型FZ硅晶片上产生选择性发射器,其具有沉积在顶表面上的薄N +掺杂剂膜。晶圆。除了Q开关激光器之外,还使用1070nm连续波激光,并且脉冲能量和脉冲持续时间都变化。为了确定N +掺杂剂膜的效果,膜的厚度也随着所有激光器而变化并加工。这些激光器和不同掺杂剂层的结果通过电流 - 电压测量来表征,并相比,以确定最佳处理发射器的最佳处理波长和能量,这使得二极管性能最大化,同时最小化晶格损坏和串联电阻。

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