Study and Simulation of the Model of Stability Measurement for Integrated Semiconductor Equipment

摘要

Performance analysis and capacity prediction of integrated semiconductor equipment is a very difficult task, it is a effective way to solve this problem by setting up a model of equipment performance measurement. This paper details the composition and related operation principle of parallel integrated semiconductor equipment. This paper also deriving a set of stability measurement model, we call it Throughput Model, for integrated semiconductor equipment according to its operation principle, which reflect the relationship between stability and output error. The model can effectively calculate the stability of equipment and help system design.