Direct deposition of surface acoustic wave sensors by aerosol jet printing technique

机译：通过气溶胶喷射印刷技术直接沉积表面声波传感器

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Experimental deposition by Aerosol Jet Printing (AJP) of high resolution InterDigital Transducer (IDT) Surface Acoustic Wave (SAW) sensors on piezoelectric Lead Zirconate Titanate (PZT) substrate is reported. Characterization of the printed sensors is presented, based on natural frequency assessment through electrical impedance measurements, and on surface wave velocity estimation by laser interferometry.

机译：据报道，通过气溶胶喷射印刷（IDT）表面声波（SAW）传感器的气溶胶喷射印刷（AJP）的实验沉积报道了压电引线锆钛酸钛酸盐（PZT）衬底。通过电阻抗测量和通过激光干涉测量法的表面波速度估计来呈现印刷传感器的表征。

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《International Conference Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components》|2012年||共8页
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Denis Vandormael; Olivier Rigo; Laurent Seronveaux; Daniel Monnoye; Eric Beeckman; Thierry Dormal; Marc Duquennoy; Mohammadi Ouaftouh; Julien Deboucq; Frederic Jenot;
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Direct deposition of surface acoustic wave sensors by aerosol jet printing technique

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