In the field of silicon microcantilever-based physical and chemical sensors, several attempts have been afforded to improve their performances by mostly incorporating micro/nanostructures or coating their surfaces with inorganic and organic sensitive layers [1, 2]. By synthesizing silicon nanowires (SiNWs) directly on silicon cantilevers with a solid-liquid-solid growing mechanism, the yielded SiNWs are unaligned and hardly controlled [1]. Meanwhile, for thin polymer and zeolites layer coating methods, the complexity of attaining uniform and consistent coating layers on the active structures can limit the sensor functionality [2].
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