The effects of the sputter-etching power on the formation of conical protrusions on the surface of SUS304 stainless steel

摘要

SUS304 stainless steel samples were sputter-etched by a radio frequency (RF) magnetron sputtering apparatus. Correlation between the formation of conical protrusions on the steel surface and sputter power was discussed. The results show that the conical protrusion precipitates both uniformly and densely on the surface with the power being 600W, the anode-to-substrate distance being 50mm, the argon gas flow ratio being 50sccm and the sputter-etching time being 6h. The roughness of the samples sputter-etched at various sputtering powers for 6h was analyzed. According to the results, sputter-etching brings about the development of surface roughness, which in turn may affect the sputter-etching process.