Design and System Level Simulation of Double-mass Silicon Micro Gyroscope

摘要

The double-mass silicon micro gyroscope prototype, mechanical structure and working principle are introduced, which has high sensitivity. According to dynamic equations, the signal characteristics are analyzed and the mathematical models of scale factor and bias are established. Then the system level model is established on Simulink platform, including mechanical errors and electrostatic coupling errors and the performance are evaluated. Finally, five gyroscope prototypes are tested, and the performance parameters are as follows, the scale factor is 15.63~19.210mV/°/s, bias stability is 8.9~23.9°/h, bias repeatability is 7.5~19.4°/h.