MEMS Mirror Array with Crosstalk Shielding

摘要

The design, fabrication, and quasi-static testing of a high fill factor electrostatically actuated MEMS mirror array with application to spectrometry are presented. A method for minimizing crosstalk between adjacent mirrors of the MEMS mirror array is shown using ground plane shielding and a capping structure. Mirror inclination as a function of applied voltage is shown with reference to simulated data.