Quantify equipment capacity impacts induced by maximum waiting time constraint through simulation

摘要

Maximum waiting time constraint is one of the most complex questions in wafer fabrication. The constraint setting will definitely induce equipment capacity loss. However, it's difficult to quantify the impacts precisely. This paper illustrates the approach to quantify equipment capacity loss induced by maximum waiting time constraint settings through simulation. With the model, we can prioritize the impacts, and put efforts to prolong the specifications of highest ones. Besides, equipment capacity can be estimated more precisely by applying the model results.