Influence of Elastic Parameters on The Evolution of Elasticity Modulus of Thin Films

摘要

In recent years, it appears many structures in the form of thin films or multilayers, used as coatings for surface protection, or to provide materials with new properties different from those of substrates. These properties are the subject of a growing number of studies in order to produce Nano or micro structures with different degrees of quality, and cost as well as the manufacture of thin film properties more functional and more controllable. As the thicknesses are close to micrometric or nanometric scales, the modulus of elasticity are difficult to measure and experimental results are rarely published in the literature. In this context, we propose an analytical qualitative methodology to describe the influence of acoustic parameters of thin films on the evolution of elastic moduli the most used. This method is based on the determination of the acoustic signature V(z) of several thin layers deposited on different substrates, as well the information on the propagation velocity of ultrasonic waves are obtained. Thus, the dispersion curves representing the variation of the modulus of elasticity (Young and the shear), were determined. We have noticed that, according to the type of substrate (light, medium or heavy), we observed the appearance of some anomalies in curves that are generally associated with changes in the acoustic properties of each of the examined layers. We have shown that these anomalies are mainly due to the effect loading, and represent one of the fundamental parameters determining the appearance or disappearance of a phenomenon and represent one of the basic parameters determining the appearance or disappearance of phenomena. Finally, we determine the Poisson ratio of thin films in order to calculate other elastic parameters such as the compressor modulus.