Research of two-dimensional airflow angular velocity sensor

摘要

Proposed a two-dimensional air-angular velocity sensor. Dual vertical heat resistance wire, two-dimensional angular velocity sensitive; By simply supported edge piezoelectric pump support to improve the sensitivity of the sensor; Using stacked sheet round table groove type nozzle, improved stability and repeatability of the sensor; Using software compensation processing to improve the temperature performance and linearity of the sensor. Experimental results show that the sensitivity of the sensor improve nearly double, Zero variation decrease from≤10% to≤0.2%, operating temperature extended from -10°C～+40°C to -45°C～+65°C, linearity decrease from≤1% to ≤0.5%, the amount of sensitivity decrease from ≤10% to ≤0.6%.