ANGULAR VELOCITY SENSOR ELEMENT, ANGULAR VELOCITY SENSOR AND ANGULAR VELOCITY SENSOR UNIT BOTH USING ANGULAR VELOCITY SENSOR ELEMENT, AND SIGNAL DETECTING METHOD FOR ANGULAR VELOCITY SENSOR UNIT

摘要

The angular velocity sensor of the present invention has one end connected to holding section (9) and the other end connected to weighting section (10). According to the angular velocity sensor, driving arm (11) has a dog-leg structure of arm (11a) and arm (11b) extending in a direction perpendicular to a connecting direction of holding section (9) and weighting section (10).