Online correction of aberrations to reduce the measuring uncertainty for the optical high-speed measurement of high-precision cutting tools using coordinate measuring machines

摘要

This paper presents a novel approach to correct aberrations, especial the telecentricity error of lenses during the optical measurement of high-precision cutting tools. The displacement of the cutting edges from the focus plane because of the high-speed measuring process is determined based on focus methods and the 4D axis information from the coordinate measuring machine. The known displacement and the offline determined correction function to describe the telecentricity error of lenses are used for the online correction of each measurement point. So the measuring uncertainty because of the increasing influences of aberrations during the high-speed acquisition process can be reduced.