The use of tracking interferometers has gained industrial application for the testing and the calibration of measuring and production machines. The concept is based on sequential multilateration [1] and can realize calibration uncertainties in the sub-micron order. Another application for tracking interferometers is the real-time multilateration for accurate and highly dynamic measurement of 3D motion. This paper presents the characteristics of a high speed high accuracy multilateration system based on interferometric displacement measurements.
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