High Speed High Accuracy Multilateration System Based on Tracking Interferometers

摘要

The use of tracking interferometers has gained industrial application for the testing and the calibration of measuring and production machines. The concept is based on sequential multilateration [1] and can realize calibration uncertainties in the sub-micron order. Another application for tracking interferometers is the real-time multilateration for accurate and highly dynamic measurement of 3D motion. This paper presents the characteristics of a high speed high accuracy multilateration system based on interferometric displacement measurements.