Green Photoluminescence from Al2O3:Tb films by Medium Frequency Reactive Magnetron Sputtering

摘要

Terbium-doped aluminum oxide films (Al2O3 :Tb) were deposited by the medium frequency reactive magnetron sputtering technique using aluminum and terbium composite targets. It was found that under ultraviolet excitation with a wavelength of 254nm the films revealed yellowish green luminescence that was attributed to the transitions from 5D4 excited state to 7FJ multiplet ground states of Tb3+ ions. The observed emission has the spectral characteristics typical of radiative transitions among the electronic energy levels associated with the Tb3+ ion. The presence of Tb as well as the stoichiometry of these films have been determined by energy dispersive x-ray spectroscope (EDS) measurements. The crystalline structure of the sample was analysed by x-ray diffractometry (XRD). Auger electron spectroscopy has been used to estimate the stoichiometry of the films is also reported. This luminescence feature has an advantage for display techniques,which require three basic color emission.