Study on Artificial Polycrystalline Piezoelectric Material with the Calibration Mechanism of the Micro-Displacement Sensor Based on Piezoelectric Ceramic

摘要

In this paper, a calibration mechanism of sensor based on artificial polycrystalline piezoelectric material and a kind of micro-voltage output system have been designed through understanding the characteristics and the parameters of the capacitive displacement sensor, so as to achieve the sensor calibration interval reaches the piezoelectric ceramic resolution of 5 nm. Through the measured values in the condition that 10mV/100mV is input to piezoelectric ceramic, it can be seen that the design meets the initial requirements. Such mechanism can be used for the calibration of a variety of high-precision sensors; however, it must be used in a stable environment.