Failure Mechanisms Research of CCD Imaging Devices Induced by Pulsed Laser

摘要

Aiming at the phenomenon that irreversible bright line and all screen black happens in the CCDs irradiated by pulsed laser, the resistance between driving electrodes and substrate was measured, damage micro-morphology of different layers in the facular area was observed, exported waveforms were detected, the damage mechanisms for CCD were analyzed in detail. The coming results show that high power pulse laser induced the ablation at different layers of CCD, increased the dark current and leakage current, which induced the failure of the device.