Motion Error Analysis of Planar Optical Waveguide Automatic Aligning and Coupling platform

摘要

Aiming at problems of planar optical waveguide aligning and coupling multi-dimensional space sub-micron motion error, with using topology theory, estimating distribution of motion error paramount precisely, this paper establishes position model of precise motion platform, based on Monte Carlo method, obtains precise position distribution of fiber end point. The result indicated that this method can obtain accurate position in the adjust process of planar optical waveguide automatic aligning and coupling, and achieve effective control of aligning and coupling accuracy.