Fabrication of miniaturized atomic clocks

摘要

This contribution presents the fabrication of micromachined Cesium-vapor cells aimed to be part of miniaturized MEMS-based atomic clocks. This work was performed in the frame of a European Collaborative Project (MAC-TFC) whose target is the development of the European version of MEMS atomic clock presenting a short-term stability of 5×10~(-11) over 1 hour while operating with less than 200 mW power consumption. The consortium is made of five major academic institutions (University of Besangon/FEMTO-ST, University of Neuchatel, EPFL-Lausanne, Technological University of Wroclaw and University of Ulm); two research institutes (VTT and CEA/Leti) and three industrial partners (SAES Getters, SWATCH R&D and Oscilloquartz).