SEMICONDUCTING METAL OXIDES AS OXYGEN SENSOR

摘要

Screen printing technique provides a simple and low cost method of fabricating thick film electronic circuit components. We are developing an inductively coupled wireless sensor using a metal oxide thick film for sensing the oxygen concentration at high temperatures encountered in combustor exhaust streams. The sensing films were evaluated at temperatures between 500 C and 800 C in a mixture of nitrogen and oxygen gas. Resistance measurements of TiO2 and ZnO thick films will be presented. The inductively coupled oxygen sensor was tested at 650 C with various oxygen concentrations and the results will be discussed.