Hall current sensor IC with integrated Co-based alloy thin film magnetic concentrator

摘要

This work deals with a cobalt-based alloy thin film magnetic concentrator (MC) which is fully integrated on a Hall sensor integrated circuit (IC) developed in the 0.35 μm Bipolar CMOS DMOS (BCD) technology on 8" silicon wafer. An amorphous magnetic film with a thickness of 1μm， coercitive field H_c