OXIDE CONTAINING Co-BASED ALLOY MAGNETIC FILM, OXIDE CONTAINING Co-BASED ALLOY TARGET, AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an oxide containing Co-based alloy magnetic film having a coercive force difference smaller than that of an existing one, target material and a sputtering target which can form the magnetic film, and the manufacturing method of the target member.;SOLUTION: The oxide containing Co-based alloy magnetic film and the oxide containing Co-based alloy target material which have a Fe content of ≤100 ppm, and the sputtering target which has the target material connected to its backing plate are provided. Provided with them is the manufacturing method of the target material which melts a Cr ingot with at least one kind of Co material selected from a Co ingot and Co powder to prepare a Co-Cr alloy powder which is obtained by processing the Co-Cr alloy in ATOMIZE methods after manufacturing the Co-Cr alloy, thereafter mixing the Co-Cr alloy powder, Pt powder and oxide powder to obtain mixed powder, and baking the mixed powder after molding or simultaneously with molding.;COPYRIGHT: (C)2008,JPO&INPIT