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An Analytical Model for Chemical Etching in One Dimensional Space

机译:一种尺寸空间中化学蚀刻的分析模型

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In this paper an analytical model for chemical etching in one dimensional space has been presented. Regarding to the special specifications of Ferric chloride, etching of an Aluminum work piece exposed to Ferric chloride etchant has been modeled. The proposed model shows that, in the condition of constant reaction parameters, etching rate is a linear function of time. Excellent agreement between the proposed model and the experimental results, published by Cakir (2008), validates the model. By generalization the proposed model, etching rate, or in the other word depth of etch in a specified time, for different materials with different etchants can be predicted.
机译:本文介绍了一种用于一维空间中的化学蚀刻的分析模型。关于氯化铁的特殊规格,已经建模了暴露于氯化铁蚀刻剂的铝工件的蚀刻。所提出的模型表明,在恒定反应参数的条件下,蚀刻速率是时间的线性函数。拟议的模型与Cakir(2008)出版的拟议模型和实验结果之间的良好协议验证了该模型。通过推广所提出的模型,蚀刻速率,或在指定时间内的蚀刻深度,对于具有不同蚀刻剂的不同材料可以预测。

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