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Influence of post-deposition annealing on structural, optical and electrical characteristics of NiO/ZnO thin film hetero-junction

机译:沉积退火对NiO / ZnO薄膜杂膜杂膜的结构,光学电气特性的影响

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Transparent p-n hetero-junction diodes are fabricated using, p-type NiO and n-type ZnO thin films deposited onto a Pt/Ti/glass substrate utilizing RF sputtering technique. The prepared hetero-junctions are studied for the structural, electrical and optical properties and the effect of post-deposition annealing is investigated through I-V measurements and XRD analysis. The as deposited hetero-junction is found to be giving ohmic behaviour while with post-annealing treatment it result in rectification with a ratio of forward-to-reverse current as high as 15 in the range -1.0 to 1.0 V. Forward threshold and the reverse breakdown voltages are found to be about 0.5 and -2.7 V, respectively. The forward-bias I-V characteristics are dominated by the flow of space-charge-limited current with an optical transmission of above 50% in the visible region important for the transparent electronic device fabrication.
机译:使用RF溅射技术沉积在Pt / Ti /玻璃基板上的p型NiO和N型ZnO薄膜制造透明P-N杂结二极管。研究制备的杂连接,用于结构,电气和光学性质,并通过I-V测量和XRD分析研究了沉积后退火的效果。发现作为沉积的杂交接线以欧姆行为提供欧姆行为,而退火处理处理它导致正向反向电流的比率高达15的比率-1.0至1.0 V。前进阈值和前进阈值发现反击穿电压分别为约0.5和-2.7V。前向偏置I-V特性由空间电荷限制电流的流动主导,光学传输,在可见区域中对于透明电子器件制造的重要性。

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