Gauge Block Measurement without Wringing On To Platen Using Novel Low-Coherence Interferometer First report: Measurement Principle and Preliminary Interferometric Experiment

摘要

We have developed a novel tandem low-coherence interferometer to calibrate the gauge blocks without wringing on to platen. The aims of the research are to reduce the thermal effect of wringing process, to get better accuracy and efficiency of gauge block measurements. The length of the gauge block is measured by using triangle interferometric arrangement, where the length is defined as the optical path difference between light beams reflected from both surfaces of the gauge block. By using the combination of He-Ne laser and tandem low-coherence interferometers, the length of the gauge block can be measured easily because the fringe order ambiguity can be eliminated.