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Two-dimensional Wave-front Tilt Sensor using a Two-dimensional Transmission Grating

机译:二维波前倾斜传感器使用二维变速器光栅

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A collimated wave reflected by a plane mirror is introduced on a hexagonal transmission grating. Intensity of the diffracted wave is detected by an image sensor located at a small distance from the grating. The intensity of the grating image or grating shadow on the sensor displaces according to the tilt of the incident wave. Three components of the displacement are detected from phase shifts of three components of the grating. They are calculated by Fourier transform method. With the displacements we can calculate 2-D tilt of the plane wave. This method can be applied to a compact sensor for detecting 2-D tilt of the mirror or wave-front like an autocollimator.
机译:在六边形传输光栅上引入由平面镜反射的准直波。衍射波的强度由位于距光栅的小距离处的图像传感器检测。根据入射波的倾斜,传感器上的光栅图像或光栅阴影的强度。从光栅的三个部件的相移检测位移的三个部件。它们由傅立叶变换方法计算。通过位移,我们可以计算平面波的2-D倾斜。该方法可以应用于紧凑的传感器,用于检测镜子的2-D倾斜或像自动调用器一样的波线。

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