Transistor Compensation Technology of Pressure Sensor Sensitivity Temperature Coefficient

摘要

This paper presents the principles of the transistor compensation technology of temperature coefficient of sensitivity (TCS) of pressure sensor. A quantitative compensation formula is demonstrated in mathematics. By experiments, the absolute value of the compensated TCS is easy to be 10×10~(-6)/°C～100×10~(-6)/°C with individual adjustment and calibration of each device's temperature compensation. The feasibility and practicability of this technology are tested. The disadvantages are discussed after the research of the experimental data, while the improvement methods are also given in the designing period. This technology exhibits the great potential practical value. These applications are promoted in the volume production. The operating performances of these pressure sensors using this technology are studied and proved they are reliable and stable.