Fabrication of nanostructures on curved surfaces

摘要

In this paper, the fabrication of nanostructures on curved surfaces is presented, which includes following procedures: First, a three-dimensional nanostructured mold with curved surfaces is created by ultrafast femtosecond laser ablation. Second, nanostructures on the curved surface are created via soft nanoimprint. Furthermore, the performance of antireflection coating (ARC) based on the nanostructures created on the curved surface is quantitatively evaluated. The simulation and experimental results show that a very high quality ARC (i.e., <99% transmission within the entire visible spectral range and over a broad field of view 120 deg) can be realized by using the proposed nanostructures. In particular, the large FOV makes it particularly suitable for applying the ARC on the curved surface, which can be greatly beneficial for a variety of applications such as ARC for lenses and curved windows.